Description
Product Overview
The Lam Research 853-049542-173 is a multi-channel temperature control PCB assembly engineered specifically for semiconductor manufacturing platforms. Utilizing a 24-channel array, this module acts as a localized closed-loop thermal controller. It interfaces multi-zone heating elements and thermal sensors within wafer processing chambers to prevent thermal drift, ensure process repeatability, and maintain strict temperature uniformity across the wafer surface during plasma etch or CVD steps.
Technical Specifications
| Parameter | Specification |
| Manufacturer | Lam Research Corporation |
| Assembly Part Number | 853-049542-173 |
| Description | ASSY TEMP CONT 24-CHANNEL |
| Channel Count | 24 Independent Thermal Control Channels |
| Primary Function | Multi-Zone Closed-Loop Temperature Regulation |
| Form Factor | Metal-Enclosed Card-Cage Slide-in / Rack Module |
| Tool Compatibility | Select Lam Research Etch and Deposition Platforms |
Application Scenarios & Fab Integration
- Electrostatic Chuck (ESC) Multi-Zone Heating: Manages tight multi-zone temperature profiles across the pedestal/chuck to optimize cross-wafer etch rate uniformity.
- Chamber Wall & Liner Heating: Controls resistive heating zones on chamber lids, liners, and showerheads to prevent process byproduct condensation.
- Subsystem Diagnostics & Maintenance: Replaces faulty thermal control cards triggering interlock alarms, heater loop open-circuit faults, or temperature runaway warnings.
853-049542-173
853-049542-173
Common Troubleshooting & Replacement Tips
- ⚠️ Check Firmware & Revision Suffix: Ensure the revision level (e.g., Rev A) matches your tool’s baseline software requirements to prevent communication protocol or PID loop faults.
- ❗ ESD Protocols: Always wear a grounded wrist strap when handling the card cage assembly to protect onboard high-precision analog-to-digital converters and microcontrollers from static discharge.
- ⚠️ Inspect Connector Pin Health: Examine the edge/backplane multi-pin connectors for recessed, bent, or oxidized contacts before sliding the assembly into the tool rack chassis.
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