Description
Product Introduction
The MKS Instruments 979B-01-0013 is a precision vacuum transducer engineered for demanding semiconductor manufacturing, thin-film deposition, and industrial vacuum processes. Combining MEMS-based Micro-Pirani thermal conductivity and piezo pressure sensing technologies into a single compact housing, it delivers seamless wide-range pressure measurement without requiring multiple discrete gauge heads.
Built with high RF noise immunity and corrosion-resistant wetted materials, this transducer eliminates signal drift in harsh plasma processing environments. Unlike traditional glass-tube Pirani gauges that shatter under thermal shock or overpressure, its solid-state MEMS construction handles rapid pump-down cycles and atmospheric vents without losing calibration accuracy.
Key Technical Specifications
| Parameter | Specification |
| Manufacturer | MKS Instruments |
| Part Number | 979B-01-0013 |
| Sensing Technology | DualTrans (Micro-Pirani & Piezoelectric) |
| Measurement Range | 1 \times 10^{-5} Torr to 1500 Torr (Atmosphere) |
| Accuracy | \pm 1\% of Reading (typical within calibrated decade ranges) |
| Operating Voltage | 9V DC to 30V DC Unregulated Power Input |
| Output Communications | RS485 Digital / Configurable Analog Voltage Output |
| Vacuum Fitting / Flange | KF-16 / KF-25 / VCR options (Model Dependent) |
| Wetted Materials | Silicon, Pyrex, Stainless Steel, Viton / Kalrez Seals |
| Operating Temperature | 10°C to 50°C (50°F to 122°F) |
Application Scenarios & The “Trench” Experience
It is 3 AM in a semiconductor fab during a critical wafer run. A load-lock chamber fails to transition from roughing to high-vacuum state because an aging vacuum gauge drifted out of calibration, falsely reporting an overpressure error and aborting a batch worth $80,000. Swapping in a pre-calibrated MKS 979B-01-0013 restored accurate, linear pressure tracking down to 10^{-4} Torr instantly, getting the cluster tool back online before the morning shift shift-handover.
- Semiconductor Load-Lock Chambers – Monitors rapid transit pump-down cycles from atmosphere to rough vacuum.
- PECVD & PVD Sputtering Tools – Provides reliable chamber pressure interlocks before striking plasma.
- Vacuum Heat Treating & Brazing Furnaces – Tracks system evacuation curves to prevent oxidation during high-temp cycles.
- Mass Spectrometry / RGA Front-Ends – Guards sensitive filament ionizers by ensuring roughing pumps achieve sufficient foreline vacuum.
979B-01-0013
979B-01-0013
Transparency SOP: Quality Assurance & Testing
We do not just ship boxes; we test precision vacuum hardware on actual MKS-compatible bench rigs:
- Inbound Inspection: Inspect vacuum flange sealing surfaces, knife edges, pin connectors, and factory serial stickers for damage or contamination.
- Helium Leak Integrity Test: Connect to a helium mass spectrometer leak detector to verify zero seal leakage through the transducer body.
- Power & Current Draw Test: Apply regulated 24V DC to verify internal power conditioning circuits, status LEDs, and baseline current consumption.
- Multi-Point Vacuum Calibration Check: Compare transducer digital output against a NIST-traceable Baratron capacitance manometer standard across atmospheric and millitorr pressures.
- ESD & Clean-Room Packaging: Clean sealing faces, install protective dust caps, and heat-seal in anti-static, moisture-barrier packaging.
The Veteran’s Tech Trap Guide
- ⚠️ Protect the Vacuum Seal Face: Micro-scratches on the KF flange face or VCR gasket sealing surface will cause persistent, micro-leaks that look like outgassing. Always inspect the sealing edge with a loupe before clamping it to your vacuum line.
- ❗ Beware of Oil Contamination from Roughing Pumps: If mounted upside down on a foreline, mechanical pump oil mist will drain directly into the MEMS sensor cavity, coating the Micro-Pirani element and destroying calibration. Always mount the transducer vertically or horizontally with the flange pointing down.
- ⚠️ Set the RS485 Address Before Installation: If running multiple 979B units on a multidrop serial bus, ensure each transducer has a unique node address assigned via software or DIP switches prior to powering the network. Address collisions will lock up your tool’s communication bus.
- ❗ Zero-Adjust Under High Vacuum Only: Never attempt a zero-point calibration adjustment while the chamber is at atmospheric or rough vacuum levels. Ensure the system is pumped down below 1 \times 10^{-5} Torr using a turbomolecular pump before executing a zero command.
Frequently Asked Questions (FAQ)
Q: Is the MKS 979B-01-0013 a drop-in replacement for older MKS 910 or 925 Micro-Pirani series transducers?
A: Yes. It maintains backward compatibility with MKS digital communication protocols and standard pinouts while offering the expanded range of the dual-technology piezo/pirani head.
Q: Does this transducer require a separate readout controller box to operate?
A: No. The 979B-01-0013 features integrated onboard electronics that output direct RS485 digital communication or a standard log-linear analog voltage signal directly to your PLC or tool controller.
Q: What power supply voltage does this unit require?
A: It operates across a wide DC input range, typically accepting 9 to 30V DC (24V DC nominal) from your system control rack.
Q: What type of warranty do you provide on this surplus module?
A: We cover this transducer with a full 12-month replacement warranty from the date of shipment.
Q: Is this unit factory sealed or refurbished?
A: This listing is for New Surplus stock in original factory packaging, fully verified and zero-checked by our engineering team before dispatch.
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