Description
Product Introduction
The INFICON BCG450-SD (PN: 353-557) is a high-precision TripleGauge combination vacuum sensor engineered for demanding semiconductor processing, thin-film coating, and research environments. Integrating hot-filament Bayard-Alpert, Pirani, and Piezo technologies into a single compact housing, this module provides uninterrupted total pressure measurement across a vast span from ultra-high vacuum (5 \times 10^{-10} mbar) up to atmospheric overpressure (1500 mbar).
Designed with a high-temperature DN 40 CF-F metal-sealed flange, the BCG450-SD eliminates the need for multiple discrete vacuum gauges on a single chamber port. Its automated filament switching and gas-type independent piezo sensing protect the delicate hot cathode from premature oxidation, delivering consistent process repeatability and reducing costly footprint requirements in vacuum system architectures.
Key Technical Specifications
| Parameter | Value |
| Product Series | INFICON TripleGauge Series |
| Part Number | 353-557 |
| Measurement Range | 5 \times 10^{-10} mbar to 1500 mbar (3.75 \times 10^{-10} Torr to 1125 Torr) |
| Sensor Combination | Hot-Filament Bayard-Alpert + Pirani + Piezo |
| Vacuum Connection | DN 40 CF-F (ConFlat metal-sealed flange) |
| Output Signal / Interface | Digital bus communication (EtherCAT / RS485 / Analog output options) |
| Filament Material | Dual Yttria-coated Iridium filament |
| Accuracy | \pm 15\% of reading in high vacuum range |
| Maximum Overpressure | 2 bar absolute |
| Operating Temperature | +10 °C to +50 °C (32 °F to 122 °F) |
Application Scenarios & The “Trench” Experience
Picture this: It’s 1:30 AM during a continuous wafer deposition run. Suddenly, a vacuum readout fault causes an automated interlock to abort a high-purity process cycle, threatening a batch of sub-nanometer wafers worth tens of thousands of dollars. Troubleshooting isolates the issue to a burnt-out filament on an older single-purpose vacuum transducer that failed to switch off during a chamber pump-down cycle. You need an exact drop-in replacement that handles continuous wide-range tracking without blowing filaments during pressure transitions. You pull a certified surplus INFICON BCG450-SD (353-557) from spares, mount it to the DN 40 CF-F port with a fresh copper gasket, establish the digital handshake, and bring the chamber back to target base pressure before morning shift.
- Semiconductor Wafer Fabrication: Monitoring load lock pump-downs and reaction chamber base pressures across broad vacuum regimes.
- Thin-Film Coating & Optics: Continuous pressure measurement during sputtering, evaporation, and plasma-enhanced deposition processes.
- High-Energy Physics & Surface Analysis: Tracking ultra-high vacuum levels inside analytical surface characterization chambers.
Transparency SOP: Quality Assurance & Testing
We don’t just ship boxes; we test them on actual high-vacuum calibration benches. Every surplus BCG450-SD (353-557) unit undergoes a strict quality audit before leaving our warehouse:
- Inbound Mechanical Inspection: Visual check for knife-edge flange damage on the DN 40 CF-F port, housing integrity, and OEM label validation.
- Leak Rate Verification: Helium mass spectrometer leak testing to confirm seal integrity down to < 1 \times 10^{-9} mbar\cdotl/s.
- Multi-Point Vacuum Calibration: Pump-down testing against a certified reference gauge to verify Pirani-to-Bayard-Alpert crossover timing and logarithmic output linearity.
- Filament Health Check: Diagnostic check of both Yttria-coated filaments to ensure balanced emission current and low operational drift.
- Final QC & Anti-Static Packaging: Protective flange capping, ESD bubble wrap enclosure, and vacuum-sealed moisture barrier packaging.
BCG450-SD 353-557
BCG450-SD 353-557
The Veteran’s Tech Trap Guide (Crucial Value-Add)
- ⚠️ Handle the CF Knife-Edge with Care: Never touch or scratch the copper gasket sealing knife-edge on the DN 40 CF-F flange. Even a microscopic scratch will cause an unresolvable atmospheric leak in the 10^{-9} mbar region. Always use a new copper gasket during installation.
- ❗ Protect Hot-Filament from Sudden Venting: Although the BCG450-SD features automatic filament protection, rapid venting to atmospheric pressure while the Bayard-Alpert filament is energized can cause oxidation or premature failure. Ensure your PLC logic interlocks the gauge emission control with the Pirani pressure threshold.
- ⚠️ Zero-Point Calibration Matters: Perform a zero-point adjustment on the Piezo/Pirani element under deep vacuum before running critical process recipes to compensate for thermal drift and local ambient variations.
Frequently Asked Questions (FAQ for Conversion)
Q: What is the main advantage of the BCG450-SD over a standard Pirani gauge?
A: The BCG450-SD combines three separate sensing technologies in one unit. While a standard Pirani gauge cannot measure below 10^{-4} mbar, the BCG450-SD seamlessly transitions down to 5 \times 10^{-10} mbar using its hot-filament Bayard-Alpert sensor.
Q: Can I replace the sensor cassette or filament assembly separately?
A: Yes, INFICON offers replaceable plug-in sensor assemblies for the BCG450 series, allowing you to refurbish the gauge without replacing the entire electronics head if a filament reaches its end-of-life.
Q: Are these units brand new or surplus?
A: Our inventory consists primarily of New Surplus and Factory Sealed stock secured from semiconductor fab liquidations and excess spares inventories. Each unit is leak-checked and bench-calibrated prior to shipment.
Q: Why buy surplus INFICON gauges instead of ordering factory direct?
A: OEM factory lead times for specialized high-vacuum combination gauges can stretch into several weeks. Sourcing certified surplus units gets original OEM hardware into your plant immediately, preventing costly tool downtime.
Q: What warranty comes with the gauge?
A: Every INFICON BCG450-SD (PN: 353-557) ships with our comprehensive 12-month full replacement warranty.
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